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SEM¿ë Pt Sputtering Target(½ºÆÄÅ͸µ Ÿ°ÔÆ®)

    Model #

    ¼øµµ(%)

    µÎ²²(µm)**

    Àû¿ë ±â±â

    PT82605

    99.99

    150

    Bio-Rad/Polaron/VG(Model E1100)

    Annular Ring, o.d. 82 mm, i.d. 60 mm

    Assembled on Aluminum Ring

    PT570015

    99.99

    150

    Polaron/Bio-Rad/ISI/VG

    (Models E5000, E5200, E5400, SC502, SC7610, SC7620, PS2, PS3, E5300, ISI5400)

     57 mm dia.  Solid Disk

    PT46HT15

    99.99

    150

    JEOL 46 mm dia. "Hat" Style

    PT500015

    99.99

    150

    Eiko IB2/IB3

    50 mm dia. Soild Disk

    PT704815

    99.99

    150

    Eiko IB5

    Donughnut-shaped, o.d. 70 mm, i.d. 48 mm

    PT

    99.99

    150

    Hitachi Ion sputter Coater E-1010, E-1030

    Solid Strip

                    * Á¦Ç° °áÇÔ¿¡ µû¸¥ ºÒ·®¿¡ ÇÑÇÔ.
                    ** µÎ²²´Â °øĪ Ä¡¼ö(norminal value)ÀÌ¸ç °øÂ÷´Â ±10µm.

                    ºñ°í: »ó±â ÀÌ¿Ü ÇüÅÂÀÇ Targetµµ Á¦ÀÛ °ø±ÞÇÔ.

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