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SEM¿ë Pt Sputtering Target(½ºÆÄÅ͸µ Ÿ°ÔÆ®)
Model # |
¼øµµ(%) |
µÎ²²(µm)** |
Àû¿ë ±â±â |
PT82605 |
99.99 |
150 |
Bio-Rad/Polaron/VG(Model E1100) Annular Ring, o.d. 82 mm, i.d. 60 mm Assembled on Aluminum Ring |
PT570015 |
99.99 |
150 |
Polaron/Bio-Rad/ISI/VG (Models E5000, E5200, E5400, SC502, SC7610, SC7620, PS2, PS3, E5300, ISI5400) 57 mm dia. Solid Disk |
PT46HT15 |
99.99 |
150 |
JEOL 46 mm dia. "Hat" Style |
PT500015 |
99.99 |
150 |
Eiko IB2/IB3 50 mm dia. Soild Disk |
PT704815 |
99.99 |
150 |
Eiko IB5 Donughnut-shaped, o.d. 70 mm, i.d. 48 mm |
PT |
99.99 |
150 |
Hitachi Ion sputter Coater E-1010, E-1030 Solid Strip |
*
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**
µÎ²²´Â °øĪ Ä¡¼ö(norminal value)ÀÌ¸ç °øÂ÷´Â ±10µm.
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